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"yin km"
Showing items 1-4 of 4 (1 Page(s) Totally)
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| 國立交通大學 |
2014-12-08T15:47:13Z |
HRTEM and EFTEM studies of the evolution of Cu/Ta/SiO2/Si interfaces in ULSI devices
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Yin, KM; Chang, L; Chen, FR; Kai, JJ; Chuang, CCCG; Shen, CF; Lo, SC; Ding, P; Chin, B; Zhang, H; Chen, F |
| 國立交通大學 |
2014-12-08T15:43:47Z |
The effect of oxygen in the annealing ambient on interfacial reactions of Cu/Ta/Si multilayers
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Yin, KM; Chang, L; Chen, FR; Kai, JJ; Chiang, CC; Ding, PJ; Chin, B; Zhang, H; Chen, FS |
| 國立交通大學 |
2014-12-08T15:43:47Z |
Oxidation of Ta diffusion barrier layer for Cu metallization in thermal annealing
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Yin, KM; Chang, L; Chen, FR; Kai, JJ; Chiang, CC; Chuang, G; Ding, PJ; Chin, B; Zhang, H; Chen, FS |
| 國立交通大學 |
2014-12-08T15:43:34Z |
The effect of oxygen on the interfacial reactions of Cu/TaNx/Si multilayers
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Yin, KM; Chang, L; Chen, FR; Kai, JJ |
Showing items 1-4 of 4 (1 Page(s) Totally)
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