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Institution Date Title Author
國立成功大學 2018-03-1 Damage and annealing recovery of boron-implanted ultra-shallow junction: The correlation between beam current and surface configuration Chang;Feng-Ming;Wu;Zong-Zhe;Lin;Yen-Fu;Kao;Li-Chi;Wu;Cheng-Ta;JangJian;Shiu-Ko;Chen;Yuan-Nian;Lo;Yao, Kuang

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