| 臺大學術典藏 |
2021-08-05T02:41:49Z |
Equipment deterioration modeling and cause diagnosis in semiconductor manufacturing
|
Rostami H;Blue J;Chen A;Yugma C.; Rostami H; Blue J; Chen A; Yugma C.; JAKEY BLUE |
| 臺大學術典藏 |
2021-08-05T02:41:49Z |
Chamber Mismatching Calibration with Adjusted Run-to-Run Regulation in Semiconductor Manufacturing
|
Chouichi A;Blue J;Yugma C;Pasqualini F.; Chouichi A; Blue J; Yugma C; Pasqualini F.; JAKEY BLUE |
| 臺大學術典藏 |
2021-08-05T02:41:47Z |
Equipment deterioration modeling and cause diagnosis in semiconductor manufacturing
|
Rostami H;Blue J;Chen A;Yugma C.; Rostami H; Blue J; Chen A; Yugma C.; ARGON CHEN |
| 臺大學術典藏 |
2020-03-02T06:40:10Z |
Integration of scheduling and advanced process control in semiconductor manufacturing: Review and outlook
|
Yugma, C.; Blue, J.; Dauzere-P?r?s, S.; Vialletelle, P.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:09Z |
Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook
|
Yugma, C.; Blue, J.; Dauz?re-P?r?s, S.; Obeid, A.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:07Z |
Automatic equipment fault fingerprint extraction for the fault diagnostic on the batch process data
|
Rostami, H.; Blue, J.; Yugma, C.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:07Z |
Heterogranular multivariate analytics for detecting and controlling the root causes of the mismatching machines in semiconductor manufacturing
|
Chouichi, A.; Blue, J.; Yugma, C.; Pasqualini, F.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:06Z |
The detection and the control of machine/chamber mismatching in semiconductormanufacturing
|
Chouichi, A.; Blue, J.; Yugma, C.; Pasqualini, F.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:06Z |
Equipment Deterioration Modeling and Causes Diagnosis in Semiconductor Manufacturing
|
Rostami, H.; Blue, J.; Chen, A.; Yugma, C.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:01Z |
Parallel machine scheduling with time constraints on machine qualifications
|
Nattaf, M.;Dauz?re-P?r?s, S.;Yugma, C.;Wu, C.-H.; Nattaf, M.; Dauz?re-P?r?s, S.; Yugma, C.; Wu, C.-H.; CHENG-HUNG WU |
| 臺大學術典藏 |
2020-03-02T06:40:01Z |
Parallel machine scheduling with time constraints on machine qualifications
|
Nattaf, M.;Dauz?re-P?r?s, S.;Yugma, C.;Wu, C.-H.; Nattaf, M.; Dauz?re-P?r?s, S.; Yugma, C.; Wu, C.-H.; CHENG-HUNG WU |
| 臺大學術典藏 |
2020-03-02T06:39:52Z |
Equipment Deterioration Modeling and Causes Diagnosis in Semiconductor Manufacturing
|
Rostami, H.; Blue, J.; Chen, A.; Yugma, C.; ARGON CHEN |
| 臺大學術典藏 |
2017 |
Equipment condition diagnosis and fault fingerprint extraction in semiconductor manufacturing
|
Rostami, H.; Blue, J.; Yugma, C.; JAKEY BLUE |
