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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
國立交通大學 2014-12-12T02:11:29Z Study on anew type phase shifting mask for 0.35μm pattern transfer 周岳霖; Zhou, Yue-Lin; 龍文安; Long, Wen-An

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