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Showing items 1-13 of 13 (1 Page(s) Totally)
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| 臺大學術典藏 |
2018-09-10T07:42:40Z |
Silicon-Oxynitride Films Prepared for 157 nm Attenuated Phase Shifting Masks
|
H. L. Chen; F. D. Lai; L. A. Wang; LON A. WANG |
| 臺大學術典藏 |
2018-09-10T04:59:41Z |
Design of a tri-layer bottom anti-reflective coating for KrF, ArF and F2 lithographies
|
W. C. Cheng; F. D. Lai; H. M. Huang; L. A. Wang; LON A. WANG |
| 臺大學術典藏 |
2018-09-10T04:35:52Z |
Ultrathin TiO2 amorphous films for high transmittance APSM blanks at 157 and 193 nm wavelength simultaneously
|
F. D. Lai,; C. M. Chang,; L. A. Wang,; T. S. Yih,; LON A. WANG |
| 臺大學術典藏 |
2018-09-10T04:15:34Z |
Design of (ZrO2)x/(Cr2O3)y/(Al2O3)1-x-y superlattices for high transmittance APSM at 193 nm wavelength
|
F. D. Lai; L. A. Wang; LON A. WANG |
| 臺大學術典藏 |
2018-09-10T04:15:33Z |
Fabrication and Characterization of Aluminum Oxide/Chromium Oxide Optical Superlattice for APSM at 193nm Wavelength
|
F. D. Lai; L. A. Wang; LON A. WANG |
| 臺大學術典藏 |
2018-09-10T03:50:48Z |
Optical-Constant Tunable (ZrO2)x/(Cr2O3)y/(Al2O3)1-x-y Optical Superlattice for APSM in ArF Lithography
|
F. D. Lai; L. A. Wang; LON A. WANG |
| 臺大學術典藏 |
2018-09-10T03:50:48Z |
Design of (ZrO2)x/(Cr2O3)y/(Al2O3)1-x-y Superlattice for High Transmittance APSM at 193nm Wavelength
|
F. D. Lai; L. A. Wang; LON A. WANG |
| 臺大學術典藏 |
2018-09-10T03:50:48Z |
Optical-constant Tunable AlO/CrO/ZrO Optical Superlattices for APSM working in ArF Lithography
|
L. A. Wang; F.D. Lai; LON A. WANG |
| 臺大學術典藏 |
2018-09-10T03:50:47Z |
Optical properties of CrO/ZrO optical superlattice for attenuated phase shifting mask at 193 nm wavelength
|
F. D. Lai; L. A. Wang; LON A. WANG |
| 國立高雄第一科技大學 |
2004.06 |
Design of a tri-layer bottom anti-reflective coating for KrF, ArF and F2 lithographies
|
W.C.Cheng;F.D.Lai;H.M.Huang;Lon, A.Wang |
| 臺大學術典藏 |
2003-06 |
Ultra-thin Cr2O3 Well-crystallized films for high transmittance APSM in ArF line
|
F. D. Lai,; C. Y. Huang,; C. M. Chang,; L. A. Wang,; W. C. Cheng,; LON A. WANG |
| 國立高雄第一科技大學 |
2002.04 |
Fabrication and characterization of aluminium oxide/chromium oxide optical superlattice for APSM at 193nm wavelength
|
F.D.Lai;L.A.Wang |
| 國立高雄第一科技大學 |
2001.09 |
Optical Properties of CrO/ZrO Optical Superlattice for Attenuated Phase Shifting Mask at 193nm Wavelength
|
F.D.Lai;L.A.Wang |
Showing items 1-13 of 13 (1 Page(s) Totally)
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