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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
南台科技大學 2008-09 Ion beam sputter deposited TiAlN films for metal–insulator–metal (Ba,Sr)TiO3 capacitor application 王聖璋; Sheng-Yi Lee; Sheng-Chang Wang; Jen-Sue Chen; Jow-Lay Huang
南台科技大學 2007-12 Effects of nitrogen partial pressure on electrical properties and thermal stability of TiAlN films by ion beam sputter deposition 王聖璋; Sheng-Yi Lee; Sheng-Chang Wang; Jen-Sue Chen; Jow-Lay Huang
南台科技大學 2006-11 Effects of deposition and post-annealing conditions on electrical properties and thermal stability of TiAlN films by ion beam sputter deposition 王聖璋; Sheng-Yi Lee; Sheng-Chang Wang; Jen-Sue Chen; Jow-Lay Huang

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