臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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	2019臺灣學術機構典藏研討會
	機構典藏系統RC7版本已發佈

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Institution	Date	Title	Author
中國文化大學	2019-10	Mechanical property evaluation of ZrSiN films deposited by a hybrid superimposed high power impulse- medium frequency sputtering and RF sputtering system	Tang, QL (Tang, Qi-Lin); Wu, YC (Wu, Yu-Chuan); Lou, BS (Lou, Bih-Show); Chen, ZY (Chen, Zhen-Yu); Lee, JW (Lee, Jyh-Wei)

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