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Institution	Date	Title	Author
臺大學術典藏	2020-06-16T06:34:48Z	Non-delta-chrome optical proximity correction methodology for process models with three-dimensional mask effects (vol 10, 033010, 2011)	Ng, Philip C. W.;Tsai, Kuen-Yu;Melvin, Lawrence S.; Ng, Philip C. W.; Tsai, Kuen-Yu; Melvin, Lawrence S.; KUEN-YU TSAI
臺大學術典藏	2019-10-22T02:34:53Z	Servo system design of a high-resolution piezo-driven fine stage for step-and-repeat microlithography systems	Tsai Kuen-Yu;Yen Jia-Yushjia-Yush Yen; Tsai Kuen-Yu; Yen Jia-Yush; JIA-YUSH YEN
臺大學術典藏	2018-09-10T08:46:32Z	Impact of process-effect correction strategies on variability of critical dimension and electrical characteristics in extreme ultraviolet lithography	Ng, Sheng-Wei ; Chien, Bo-Sen ; Chang, Kuen-Yu ; Tsai*, Yi-Chang ; Lu, Jia-Han ; Li,Alek C.; ChenNg, Philip C.W.; Chien, Sheng-Wei; Chang, Bo-Sen; Tsai, Kuen-Yu; Lu, Yi-Chang; Li, Jia-Han; Chen, Alek C.; Ng, Philip C.W.; Chien, Sheng-Wei; Chang, Bo-Sen; Tsai, Kuen-Yu; Lu, Yi-Chang; Li, Jia-Han; Chen, Alek C.; YI-CHANG LU; KUEN-YU TSAI; Li, Jia-Han
臺大學術典藏	2018-09-10T08:42:00Z	In situ beam drift detection using a two-dimensional electron-beam position monitoring system for multiple-electron-beam-direct-write lithography	Tsai, Kuen-Yu; Ng, Philip C.W.; Ng, Hoi-Tou; Liu, Chun-Hung; Shen, Yu-Tian; Kuan, Chieh-Hsiung; Chen, Yung-Yaw; Kuo, Yi-Hung; Wu, Cheng-Ju; Yen, Jia-Yush; Chen, S.-Y.; CHIEH-HSIUNG KUAN; Tsai, Kuen-Yu; YUNG-YAW CHEN; JIA-YUSH YENet al.
臺大學術典藏	2018-09-10T08:18:20Z	Stochastic simulation of photon propagation in Si for extreme-ultraviolet mask-defect inspection	Pei, Ting-Hang;Tsai, Kuen-Yu;Li, Jia-Han; Pei, Ting-Hang; Tsai, Kuen-Yu; Li, Jia-Han; Tsai, Kuen-Yu; Li, Jia-Han; Cheng, I-Chun
國立臺灣大學	2011	A fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects	Ng, Philip C. W.; Tsai, Kuen-Yu; Lee, Yen-Min; Li, Jia-Han; Wang, Fu-Min; Chen, Alek C.
國立臺灣大學	2011	Silicon photodiodes for electron beam position and drift detection in scanning electron microscopy and electron beam lithography system	Kuo, Yi-Hung; Wu, Cheng-Ju; Yen, Jia-Yush; Chen, Sheng-Yung; Tsai, Kuen-Yu; Chen, Yung-Yaw
國立臺灣大學	2011	In situ beam drift detection using a two-dimensional electron-beam position monitoring system for multiple-electron-beam-direct-write lithography	Chen, Sheng-Yung; Tsai, Kuen-Yu; Ng, Philip C.W.; Ng, Hoi-Tou; Liu, Chun-Hung; Shen, Yu-Tian; Kuan, Chieh-Hsiung; Chen, Yung-Yaw; Kuo, Yi-Hung; Wu, Cheng-Ju; Yen, Jia-Yush
國立臺灣大學	2011	Impact of Process-Effect Correction Strategies on Variability of Critical Dimension and Electrical Characteristics in Extreme Ultraviolet Lithography	Ng, Philip C.W.; Chien, Sheng-Wei; Chang, Bo-Sen; Tsai, Kuen-Yu; Lu, Yi-Chang; Li, Jia-Han; Chen, Alek C.
國立臺灣大學	2011	Errata: Fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects	Ng, Philip C.W.; Tsai, Kuen-Yu; Lee, Yen-Min; Wang, Fu-Min; Li, Jia-Han; Chen, Alek C.
臺大學術典藏	2011	Errata: Fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects	Chen, Alek C.; Li, Jia-Han; Wang, Fu-Min; Lee, Yen-Min; Ng, Philip C.W.; Tsai, Kuen-Yu; Ng, Philip C.W.; Tsai, Kuen-Yu; Lee, Yen-Min; Wang, Fu-Min; Li, Jia-Han; Chen, Alek C.
國立臺灣大學	2010	Stochastic Simulation of Photon Propagation in Si for Extreme-Ultraviolet Mask-Defect Inspection	Pei, Ting-Hang; Tsai, Kuen-Yu; Li, Jia-Han
國立臺灣大學	2010	Manufacturability analysis of a MEMS-based electron-optical system design for direct-write lithography	Chen, Sheng-Yung; Chen, Shin-Chuan; Chen, Hsing-Hong; Pei, Ting-Han; Tsai, Kuen-Yu
國立臺灣大學	2010	Fresnel zone plate manufacturability analysis for direct-write lithography by simulating focusing and patterning performance versus fabrication errors	Tsai, Kuen-Yu; Chen, Sheng-Yung; Pei, Ting-Han; Li, Jia-Han
國立臺灣大學	2010	Efficient scattering simulations for equivalent extreme ultraviolet mask multilayer structures by modified transmission line theory and finite-difference time-domain method	Lee, Yen-Min; Li, Jia-Han; Ng, Philip C. W.; Pei, Ting-Hang; Wang, Fu-Min; Tsai, Kuen-Yu; Chen, Alek C.
國立臺灣大學	2010	Stochastic simulation of photon propagation in Si for extreme-ultraviolet mask-defect inspection	Pei, Ting-Hang; Tsai, Kuen-Yu; Li, Jia-Han
國立臺灣大學	2008	Design of automatic controllers for model-based OPC with optimal resist threshold determination for improving correction convergence	Su, Yi-Sheng; Ng, Philip C. W.; Tsai, Kuen-Yu; Chen, Yung-Yaw
臺大學術典藏	2008	Design of automatic controllers for model-based OPC with optimal resist threshold determination for improving correction convergence	Su, Yi-Sheng; Ng, Philip C. W.; Tsai, Kuen-Yu; Chen, Yung-Yaw; Su, Yi-Sheng; Ng, Philip C. W.; Tsai, Kuen-Yu; Chen, Yung-Yaw
國立臺灣大學	2006	A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography	Hu, Ni; Tay, Arthur; Tsai, Kuen-Yu
國立臺灣大學	2005-10	On the Sensitivity Improvement and Cross-correlation Methodology for Confocal EUV Mask Blank Defect Inspection Tool Fleet	蔡坤諭; Gullikson, Eric; Kearney, Patrick, Stivers, Alan R.; Tsai, Kuen-Yu; Gullikson, Eric; Kearney, Patrick, Stivers, Alan R.
國立臺灣大學	2005-03	Modeling the defect inspection sensitivity of a confocal microscope	Gullikson, Eric M.; Tejnil, Edita; 蔡坤諭; Stivers, Alan R.; Kusunose, H.; Gullikson, Eric M.; Tejnil, Edita; Tsai, Kuen-Yu; Stivers, Alan R.; Kusunose, H.
國立臺灣大學	2005-03	Real-time control of photoresist absorption coefficient uniformity	Tay, Arthur; Ho, Weng-Khuen; Wu, Xiaodong; 蔡坤諭; Tay, Arthur; Ho, Weng-Khuen; Wu, Xiaodong; Tsai, Kuen-Yu
國立臺灣大學	2004-11	DQIT: /spl mu/-synthesis without D-scale fitting	蔡坤諭; Hindi, Haitham A.; Tsai, Kuen-Yu; Hindi, Haitham A.
國立臺灣大學	2004-09	Design of feedforward filters for improving tracking performances of existing feedback control systems	蔡坤諭; Schaper, Charles D.; Kailath, Thomas; Tsai, Kuen-Yu; Schaper, Charles D.; Kailath, Thomas
國立臺灣大學	2002-05	Design of feedforward filters for improving tracking performances of existing feedback control systems	蔡坤諭; Schaper, Charles D.; Kailath, Thomas; Tsai, Kuen-Yu; Schaper, Charles D.; Kailath, Thomas
國立臺灣大學	2002-05	DQIT: /spl mu/-synthesis without D-scale fitting	蔡坤諭; Hindi, Haitham A.; Tsai, Kuen-Yu; Hindi, Haitham A.
國立臺灣大學	1999-11	Servo system design of a high-resolution piezo-driven fine stage for step-and-repeat microlithography systems	蔡坤諭; Yen, Jia-Yush; Tsai, Kuen-Yu; Yen, Jia-Yush

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