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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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2019臺灣學術機構典藏
研討會
機構典藏系統RC7版本已
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Institution Date Title Author
元智大學 Jun-18 Silicon etching of difluoromethane atmospheric pressure plasma jet combined with its spectroscopic analysis Yu-Ching Sung; Ta-Chin Wei; You-Chia Liu; Chun Huang
元智大學 Jan-18 Effect of low-pressure nitrogen plasma treatment on the surface properties and electrochemical performance of polyethylene separator using in lithium ion battery Chun Li; Hsiao-Ling Li; Chi-Heng Li; Yu-Shuan Liu; Yu-Ching Sung; Chun Huang
元智大學 Feb-19 Research on the Gas Effect of Octafluorocyclobutane Plasma Jet at Atmospheric Pressure for Silicon Etching Wei-Ting Liu; Ta-Chin Wei; Yu-Ching Sung; Chou-Yuan Cheng; Ting-Hao Chen; Chun Huang
元智大學 2018 利用噴射式大氣電漿束進行三氟甲烷電漿對單晶矽蝕刻 宋俞靜; Yu-Ching Sung
元智大學 2017-12-15 Investigation on the Carbon Tetrafluoride and Trifluoromethane Plasma Jet for Silicon Etching Yu-Ching Sung; Chun Huang
元智大學 2017-11-16 Silicon Etching of Difluoromethane Atmospheric Pressure Plasma Jet combined with Its Spectroscopic Analysis Yu-Ching Sung; Ta-Chin Wei; You-Chia Liu; Chun Huang
元智大學 2017-03-01 Investigation on the octafluorocyclobutane plasma jet for silicon etching Yu-Ching Sung; Chun Huang

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