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Taiwan Academic Institutional Repository >
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"chiou tb"
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| 國立交通大學 |
2014-12-08T15:44:48Z |
Postexposure delay effect on linewidth variation in base added chemically amplified resist
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Ku, CY; Shieh, JM; Chiou, TB; Lin, HK; Lei, TF |
| 國立交通大學 |
2014-12-08T15:43:37Z |
Expanding the process window and reducing the optical proximity effect by post-exposure delay
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Ku, CY; Shieh, JM; Chiou, TB; Lin, HK; Lei, TF |
| 國立交通大學 |
2014-12-08T15:27:01Z |
Real-time process control to prevent CD variation induced by post exposure delay
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Ku, CY; Lei, TF; Shieh, JM; Chiou, TB; Chen, YC |
| 國立交通大學 |
2014-12-08T15:27:01Z |
New overlay pattern design for real-time focus and tilt monitor
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Ku, CY; Lei, TF; Shieh, JM; Chiou, TB; Lin, HK |
Showing items 1-4 of 4 (1 Page(s) Totally)
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