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教育部委託研究計畫 計畫執行:國立臺灣大學圖書館
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"chiou tb"的相關文件
顯示項目 1-4 / 4 (共1頁)
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| 國立交通大學 |
2014-12-08T15:44:48Z |
Postexposure delay effect on linewidth variation in base added chemically amplified resist
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Ku, CY; Shieh, JM; Chiou, TB; Lin, HK; Lei, TF |
| 國立交通大學 |
2014-12-08T15:43:37Z |
Expanding the process window and reducing the optical proximity effect by post-exposure delay
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Ku, CY; Shieh, JM; Chiou, TB; Lin, HK; Lei, TF |
| 國立交通大學 |
2014-12-08T15:27:01Z |
Real-time process control to prevent CD variation induced by post exposure delay
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Ku, CY; Lei, TF; Shieh, JM; Chiou, TB; Chen, YC |
| 國立交通大學 |
2014-12-08T15:27:01Z |
New overlay pattern design for real-time focus and tilt monitor
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Ku, CY; Lei, TF; Shieh, JM; Chiou, TB; Lin, HK |
顯示項目 1-4 / 4 (共1頁)
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