臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立臺灣科技大學	2008	A Practical Fab Design Procedure for Wafer Fabrication Plants	Chen, J. C. ; Dai, R. D. ; Chen, C. W.
國立臺灣科技大學	2003	Layout Improvement for the Facility Design of Semiconductor Fabrication	Chen, J. C. ; Peng, G. M. ; Sun, C. J. ; Wang, J. J. ; Chang, P. F. ; Dai, R. D.

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