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Institution Date Title Author
國立交通大學 2014-12-08T15:27:05Z Fabrication of cantilever type microswitches using surface micromachining technology Chang, KM; Jou, CF; Luo, JJ; Kuo, LY; Deng, IC; Liang, C; Luhmann, NC
國立交通大學 2014-12-08T15:27:04Z Suppress copper diffusion through barrier metal-free hydrogen silisequioxane dielectrics by using NH3 plasma treatment Chang, KM; Deng, IC; Yeh, SJ; Yeh, TH
國立交通大學 2014-12-08T15:16:06Z Study of a circularly polarized CPW-fed inductive square slot antenna Deng, IC; Lin, RJ; Chang, KM; Chen, JB
國立交通大學 2014-12-08T15:02:22Z Highly selective etching for polysilicon and etch-induced damage to gate oxide with halogen-bearing electron-cyclotron-resonance plasma Chang, KM; Yeh, TH; Deng, IC; Lin, HC
國立交通大學 2014-12-08T15:01:50Z Nitridation of fine grain chemical vapor deposited tungsten film as diffusion barrier for aluminum metallization Chang, KM; Yeh, TH; Deng, IC
國立交通大學 2014-12-08T15:01:32Z Amorphouslike chemical vapor deposited tungsten diffusion barrier for copper metallization and effects of nitrogen addition Chang, KM; Yeh, TH; Deng, IC; Shih, CW

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