臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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	2019臺灣學術機構典藏研討會
	機構典藏系統RC7版本已發佈

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Institution	Date	Title	Author
國立中山大學	1998	Growth of c-axis oriented aluminum nitride films on GaAs substrates by reactive rf magnetron sputtering	C.C. Cheng; Y.C. Chen; R.C. Horng; H.J. Wang; W.R. Chen; E.K. Lai
國立中山大學	1997	Growth of AIN Thin Films by Reactive RF Magnetron Sputtering and the Application to Surface Acoustic Wave Devices	E.K. Lai;C.C. Cheng;W.R. Che;S.C. Lin;P.S. Cheng;Y.C. Chen

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