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机构 日期 题名 作者
國立交通大學 2019-04-02T05:59:24Z Growth and electrical characterization of Si delta-doped GaInP by low pressure metalorganic chemical vapor deposition Wang, CJ; Feng, MS; Chan, SH; Chang, CY; Wu, JH; Sze, SM
國立交通大學 2019-04-02T05:59:22Z The exothermic reaction and temperature measurement for tungsten CMP technology and its application on endpoint detection Wang, YL; Liu, C; Feng, MS; Tseng, WT
國立交通大學 2019-04-02T05:59:14Z EFFECTS OF COLUMN-III ALKYL SOURCES ON DEEP LEVELS IN GAN GROWN BY ORGANOMETALLIC VAPOR-PHASE EPITAXY LEE, WI; HUANG, TC; GUO, JD; FENG, MS
國立交通大學 2019-04-02T05:59:14Z A modified multi-chemicals spray cleaning process for post-CMP cleaning application Wang, YL; Liu, C; Feng, MS; Tseng, WT
國立交通大學 2019-04-02T05:59:13Z SILICON DELTA-DOPING OF GAINP GROWN BY LOW-PRESSURE METALORGANIC CHEMICAL-VAPOR-DEPOSITION WANG, CJ; WU, JW; CHAN, SH; CHANG, CY; SZE, SM; FENG, MS
國立交通大學 2019-04-02T05:58:48Z Integration of modified plasma-enhanced chemical vapor deposited tetraethoxysilane intermetal dielectric and chemical-mechanical polishing processes for 0.35 mu m IC device reliability improvement Wang, YL; Tseng, WT; Feng, MS
國立交通大學 2019-04-02T05:58:40Z Process optimization of plasma-enhanced chemical vapor deposited passivation thin films for improving nonvolatile memory IC performance Lin, CF; Tseng, WT; Feng, MS
國立交通大學 2019-04-02T05:58:30Z Analysis of influence of alkyl sources on deep levels in GaN by transient capacitance method Chen, JF; Chen, NC; Huang, WY; Lee, WI; Feng, MS
國立交通大學 2019-04-02T05:58:30Z Reactive ion etching of GaN with BCl3/SF6 plasmas Feng, MS; Guo, JD; Lu, YM; Chang, EY
國立交通大學 2014-12-08T15:49:07Z Growth of MgWO4 phosphor by RF magnetron sputtering Chu, JP; Hsieh, IJ; Chen, JT; Feng, MS
國立交通大學 2014-12-08T15:47:22Z Process optimization of plasma-enhanced chemical vapor deposited passivation thin films for improving nonvolatile memory IC performance Lin, CF; Tseng, WT; Feng, MS
國立交通大學 2014-12-08T15:46:44Z Optimization of multilayer thin film passivation processes for improving cache memory device performance Lin, CF; Tseng, WT; Feng, MS
國立交通大學 2014-12-08T15:46:40Z Process optimization and integration for silicon oxide intermetal dielectric planarized by chemical mechanical polish Lin, CF; Tseng, WT; Feng, MS
國立交通大學 2014-12-08T15:46:28Z A ULSI shallow trench isolation process through the integration of multilayered dielectric process and chemical-mechanical planarization Lin, CF; Tseng, WT; Feng, MS; Wang, YL
國立交通大學 2014-12-08T15:46:27Z Effects of O-2- and N2O-plasma treatments on properties of plasma-enhanced-chemical-vapor-deposition tetraethylorthosilicate oxide Chen, YC; Yang, MZ; Tung, IC; Chen, MP; Feng, MS; Cheng, HC; Chang, CY
國立交通大學 2014-12-08T15:46:11Z The novel improvement of low dielectric constant methylsilsesquioxane by N2O plasma treatment Chang, TC; Liu, PT; Mor, YS; Sze, SM; Yang, YL; Feng, MS; Pan, FM; Dai, BT; Chang, CY
國立交通大學 2014-12-08T15:46:08Z Nitric acid-based slurry with citric acid as an inhibitor for copper chemical mechanical polishing Hu, TC; Chiu, SY; Dai, BT; Tsai, MS; Tung, IC; Feng, MS
國立交通大學 2014-12-08T15:46:07Z Effects of methyl silsesquioxane electron-beam curing on device characteristics of logic and four-transistor static random-access memory Lin, CF; Tung, IC; Feng, MS
國立交通大學 2014-12-08T15:45:24Z Improved contact performance of GaN film using Si diffusion Lin, CF; Cheng, HC; Chi, GC; Bu, CJ; Feng, MS
國立交通大學 2014-12-08T15:44:44Z Characterization of excimer-laser-annealed polycrystalline silicon films grown by ultrahigh-vacuum chemical vapor deposition Chen, YC; Wu, YCS; Tung, IC; Chao, CW; Feng, MS; Chen, HC
國立交通大學 2014-12-08T15:44:34Z Study the impact of liner thickness on the 0.18 mu m devices using low dielectric constant hydrogen silsesquioxane as the interlayer dielectric Lan, JK; Wang, YL; Wu, YL; Liou, HC; Wang, JK; Chiu, SY; Cheng, YL; Feng, MS
國立交通大學 2014-12-08T15:43:54Z Investigations of effects of bias polarization and chemical parameters on morphology and filling capability of 130 nm damascene electroplated copper Chang, SC; Shieh, JM; Lin, KC; Dai, BT; Wang, TC; Chen, CF; Feng, MS; Li, YH; Lu, CP
國立交通大學 2014-12-08T15:43:39Z Selective copper metallization by electrochemical contact displacement with amorphous silicon film Lee, YP; Tsai, MS; Hu, TC; Dai, BT; Feng, MS
國立交通大學 2014-12-08T15:43:22Z X-ray reflectivity and FTIR measurements of N-2 plasma effects on the density profile of hydrogen silsesquioxane thin films Lee, HJ; Lin, EK; Wu, WL; Fanconi, BM; Lan, JK; Cheng, YL; Liou, HC; Wang, YL; Feng, MS; Chao, CG
國立交通大學 2014-12-08T15:42:48Z Electrochemically deposited Pd-induced crystallization of parallel needlelike polycrystalline silicon from prepatterned amorphous silicon thin films Chao, CW; Hu, GR; Wu, YS; Chen, YC; Feng, MS

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