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國立交通大學 |
2014-12-08T15:46:05Z |
Deposition of silicon carbon nitride films by ion beam sputtering
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Wu, JJ; Wu, CT; Liao, YC; Lu, TR; Chen, LC; Chen, KH; Hwa, LG; Kuo, CT; Ling, KJ |
國立臺灣大學 |
2002-09 |
Field emission of nanostructured amorphous SiCN films deposited by reactive magnetron sputtering of SiC in CH4/N-2 atmosphere
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Lin, HY; Chen, YC; Lin, CY; Tong, YP; Hwa, LG; Chen, KH; Chen, LC |
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