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Showing items 1-34 of 34  (1 Page(s) Totally)
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Institution Date Title Author
國立交通大學 2014-12-08T15:46:15Z Characterization and modeling of out-diffusion of manganese and zinc impurities from deep ultraviolet photoresist Wang, MY; Ko, FH; Wang, TK; Yang, CC; Huang, TY
國立交通大學 2014-12-08T15:45:57Z Evaluation of metal migration and determination of trace metals after microwave digestion for lithographic materials Ko, FH; Wang, MY; Wang, TK
國立交通大學 2014-12-08T15:45:40Z Evaluation of cleaning efficiency with a radioactive tracer and development of a microwave digestion method for semiconductor processes Lu, JK; Ko, FH; Chu, TC; Sun, YC; Wang, MY; Wang, TK
國立交通大學 2014-12-08T15:44:48Z Migration-adsorption mechanism of metallic impurities out of chemically amplified photoresist onto silicon-based substrates Yang, CC; Ko, FH; Wang, MY; Wang, TK; Wu, SC
國立交通大學 2014-12-08T15:43:51Z Characterization and modeling of the metal diffusion from deep ultraviolet photoresist and silicon-based substrate Wang, TK; Wang, MY; Ko, FH; Tseng, CL
國立交通大學 2014-12-08T15:43:50Z One-step cleaning solution to replace the conventional RCA two-step cleaning recipe for pregate oxide cleaning Pan, TM; Lei, TF; Chao, TS; Liaw, MC; Ko, FH; Lu, CP
國立交通大學 2014-12-08T15:43:18Z Comparison of novel cleaning solutions, with various chelating agents for post-CMP cleaning on poly-Si film Pan, TM; Lei, TF; Ko, FH; Chao, TS; Chiu, TH; Lee, YH; Lu, CP
國立交通大學 2014-12-08T15:42:23Z Performance evaluation of cleaning solutions enhanced with tetraalkylammonium hydroxide substituents for post-CMP cleaning on poly-Si film Pan, TM; Lei, TF; Ko, FH; Chao, TS; Liaw, MC; Lee, YH; Lu, CP
國立交通大學 2014-12-08T15:40:48Z Mechanism and modeling of ring pattern formation for electron beam exposure on Zwitterresist Chen, JK; Ko, FH; Chen, HL; Chang, FC
國立交通大學 2014-12-08T15:39:00Z Fabrication of sub-60-nm contact holes in silicon dioxide layers Ko, FH; You, HC; Chu, TC; Lei, TF; Hsu, CC; Chen, HL
國立交通大學 2014-12-08T15:38:47Z Novel one-step aqueous solutions to replace pregate oxide cleans Pan, TM; Lei, TF; Ko, FH; Chao, TS; Chin, TH; Lu, CP
國立交通大學 2014-12-08T15:37:23Z Effect of fluoroalkyl substituents on the reactions of alkylchlorosilanes with mold surfaces for nanoimprint lithography Chen, JK; Ko, FH; Hsieh, KF; Chou, CT; Chang, FC
國立交通大學 2014-12-08T15:37:18Z Behavior and surface energies of polybenzoxazines formed by polymerization with argon, oxygen, and hydrogen plasmas Chen, JK; Lin, IK; Ko, FH; Huang, CF; Chen, KS; Chan, CH; Chang, FC
國立交通大學 2014-12-08T15:37:17Z Probing the microwave degradation mechanism of phenol-containing polymeric compounds by sample pretreatment and GC-MS analysis Chang, YC; Ko, FH; Ko, CJ; Chu, TC
國立交通大學 2014-12-08T15:36:25Z Purification of multi-walled carbon nanotubes through microwave heating of nitric acid in a closed vessel Ko, FH; Lee, CY; Ko, CJ; Chu, TC
國立交通大學 2014-12-08T15:36:02Z Effects of metallic contaminants on the electrical characteristics of ultrathin gate oxides Pan, TM; Ko, FH; Chao, TS; Chen, CC; Chang-Liao, KS
國立交通大學 2014-12-08T15:27:08Z Evaluation of impurity migration and microwave digestion methods for lithographic materials Ko, FH; Hsiao, LT; Chou, CT; Wang, MY; Wang, TK; Sun, YC; Cheng, BJ; Yeng, S; Dai, BT
國立交通大學 2014-12-08T15:27:08Z Characterization and lithographic parameters extraction for the modified resists Ko, FH; Lu, JK; Chu, TC; Huang, TY; Yang, CC; Sheu, JT; Huang, HL
國立交通大學 2014-12-08T15:26:58Z Characterization and modeling of out-diffusion of cesium, manganese and zinc impurities from deep ultraviolet photoresist Ko, FH; Wang, MY; Wang, TK; Yang, CC; Huang, TY; Wu, CS
國立交通大學 2014-12-08T15:26:56Z Film characterization and evaluation of process performance for the modified electron beam resist Ko, FH; Ting, JH; Chou, CT; Hsiao, LT; Huang, TY; Dai, BT
國立交通大學 2014-12-08T15:19:40Z Resist nano-modification technology for enhancing the lithography and etching performance You, HC; Ko, FH; Lei, TF
國立交通大學 2014-12-08T15:19:21Z Direct quantitative analysis of phthalate esters as micro-contaminants in cleanroom air and wafer surfaces by auto-thermal desorption-gas chromatography-mass spectrometry Kang, YH; Den, W; Bai, HL; Ko, FH
國立交通大學 2014-12-08T15:18:51Z Structural transformation of acrylic resin upon controlled electron-beam exposure yields positive and negative resists Chen, JK; Ko, FH; Chang, TC
國立交通大學 2014-12-08T15:18:09Z Self-aligned platinum-silicide nanowires for biomolecule sensing Ko, FH; Yeh, ZH; Chen, CC; Liu, TF
國立交通大學 2014-12-08T15:17:08Z Fabrication of biomimetic super-amphiphobic surfaces through plasma modification of benzoxazine films Wang, CF; Chiou, SF; Ko, FH; Chou, CT; Lin, HC; Huang, CF; Chang, FC
國立交通大學 2014-12-08T15:16:52Z Fabricating and characterizing oblique polymer structures by electron beam writing on resist-coated SiO2 wafers Ko, FH; Chen, JK; Chang, FC
國立交通大學 2014-12-08T15:16:52Z Self-aligned tantalum oxide nanodot arrays through anodic alumina template Wu, CT; Ko, FH; Hwang, HY
國立交通大學 2014-12-08T15:16:52Z Characterization of imprinting polymeric temperature variation with fluorescent Rhodamine B molecule Ko, FH; Weng, LY; Ko, CJ; Chu, TC
國立交通大學 2014-12-08T15:16:51Z Fullerene-incorporation for enhancing the electron beam resist performance for contact hole patterning and filling You, HC; Ko, FH; Lei, TF
臺北醫學大學 2012 Facile sol–gel preparation of nanocrystal embedded thin film material for memory device Wu, CC;Tsai, YJ;Liu, PL;Yang, WL;Ko, FH
國立屏東大學 2009 Silicon substrate with hydrophilic differences affects cell proliferation and adhesion. 張雯惠;Fong, WF;WH*, Chang;Shieh, J;Ko, FH;Lin, CH.
國立屏東大學 2008 Effects of Well-Aligned Silicon Nanograss With Comparable Surface Energy and Topography on Morphology, Growth and Cell Cycle Progression of Mouse Hepatocytes 張雯惠;Lin, CH;Fong, WF;Shieh, J;Ko, FH;Chang, WH*.
國立臺灣大學 2005-02 Electrical detection of DNA hybridization with multilayer gold nanoparticles between nanogap electrodes Tsai, CY; Tsai, YH; Pun, CC; Chan, B; Luh, TY; Chen, CC; Ko, FH; Chen, PJ; Chen, PH
國立臺灣大學 2004-01 In-channel dual-electrode amperometric detection in electrophoretic chips with a palladium film decoupler Lai, CCJ; Chen, CH; Ko, FH

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