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Showing items 1-25 of 34 (2 Page(s) Totally)
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| 國立交通大學 |
2014-12-08T15:46:15Z |
Characterization and modeling of out-diffusion of manganese and zinc impurities from deep ultraviolet photoresist
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Wang, MY; Ko, FH; Wang, TK; Yang, CC; Huang, TY |
| 國立交通大學 |
2014-12-08T15:45:57Z |
Evaluation of metal migration and determination of trace metals after microwave digestion for lithographic materials
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Ko, FH; Wang, MY; Wang, TK |
| 國立交通大學 |
2014-12-08T15:45:40Z |
Evaluation of cleaning efficiency with a radioactive tracer and development of a microwave digestion method for semiconductor processes
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Lu, JK; Ko, FH; Chu, TC; Sun, YC; Wang, MY; Wang, TK |
| 國立交通大學 |
2014-12-08T15:44:48Z |
Migration-adsorption mechanism of metallic impurities out of chemically amplified photoresist onto silicon-based substrates
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Yang, CC; Ko, FH; Wang, MY; Wang, TK; Wu, SC |
| 國立交通大學 |
2014-12-08T15:43:51Z |
Characterization and modeling of the metal diffusion from deep ultraviolet photoresist and silicon-based substrate
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Wang, TK; Wang, MY; Ko, FH; Tseng, CL |
| 國立交通大學 |
2014-12-08T15:43:50Z |
One-step cleaning solution to replace the conventional RCA two-step cleaning recipe for pregate oxide cleaning
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Pan, TM; Lei, TF; Chao, TS; Liaw, MC; Ko, FH; Lu, CP |
| 國立交通大學 |
2014-12-08T15:43:18Z |
Comparison of novel cleaning solutions, with various chelating agents for post-CMP cleaning on poly-Si film
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Pan, TM; Lei, TF; Ko, FH; Chao, TS; Chiu, TH; Lee, YH; Lu, CP |
| 國立交通大學 |
2014-12-08T15:42:23Z |
Performance evaluation of cleaning solutions enhanced with tetraalkylammonium hydroxide substituents for post-CMP cleaning on poly-Si film
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Pan, TM; Lei, TF; Ko, FH; Chao, TS; Liaw, MC; Lee, YH; Lu, CP |
| 國立交通大學 |
2014-12-08T15:40:48Z |
Mechanism and modeling of ring pattern formation for electron beam exposure on Zwitterresist
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Chen, JK; Ko, FH; Chen, HL; Chang, FC |
| 國立交通大學 |
2014-12-08T15:39:00Z |
Fabrication of sub-60-nm contact holes in silicon dioxide layers
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Ko, FH; You, HC; Chu, TC; Lei, TF; Hsu, CC; Chen, HL |
| 國立交通大學 |
2014-12-08T15:38:47Z |
Novel one-step aqueous solutions to replace pregate oxide cleans
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Pan, TM; Lei, TF; Ko, FH; Chao, TS; Chin, TH; Lu, CP |
| 國立交通大學 |
2014-12-08T15:37:23Z |
Effect of fluoroalkyl substituents on the reactions of alkylchlorosilanes with mold surfaces for nanoimprint lithography
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Chen, JK; Ko, FH; Hsieh, KF; Chou, CT; Chang, FC |
| 國立交通大學 |
2014-12-08T15:37:18Z |
Behavior and surface energies of polybenzoxazines formed by polymerization with argon, oxygen, and hydrogen plasmas
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Chen, JK; Lin, IK; Ko, FH; Huang, CF; Chen, KS; Chan, CH; Chang, FC |
| 國立交通大學 |
2014-12-08T15:37:17Z |
Probing the microwave degradation mechanism of phenol-containing polymeric compounds by sample pretreatment and GC-MS analysis
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Chang, YC; Ko, FH; Ko, CJ; Chu, TC |
| 國立交通大學 |
2014-12-08T15:36:25Z |
Purification of multi-walled carbon nanotubes through microwave heating of nitric acid in a closed vessel
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Ko, FH; Lee, CY; Ko, CJ; Chu, TC |
| 國立交通大學 |
2014-12-08T15:36:02Z |
Effects of metallic contaminants on the electrical characteristics of ultrathin gate oxides
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Pan, TM; Ko, FH; Chao, TS; Chen, CC; Chang-Liao, KS |
| 國立交通大學 |
2014-12-08T15:27:08Z |
Evaluation of impurity migration and microwave digestion methods for lithographic materials
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Ko, FH; Hsiao, LT; Chou, CT; Wang, MY; Wang, TK; Sun, YC; Cheng, BJ; Yeng, S; Dai, BT |
| 國立交通大學 |
2014-12-08T15:27:08Z |
Characterization and lithographic parameters extraction for the modified resists
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Ko, FH; Lu, JK; Chu, TC; Huang, TY; Yang, CC; Sheu, JT; Huang, HL |
| 國立交通大學 |
2014-12-08T15:26:58Z |
Characterization and modeling of out-diffusion of cesium, manganese and zinc impurities from deep ultraviolet photoresist
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Ko, FH; Wang, MY; Wang, TK; Yang, CC; Huang, TY; Wu, CS |
| 國立交通大學 |
2014-12-08T15:26:56Z |
Film characterization and evaluation of process performance for the modified electron beam resist
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Ko, FH; Ting, JH; Chou, CT; Hsiao, LT; Huang, TY; Dai, BT |
| 國立交通大學 |
2014-12-08T15:19:40Z |
Resist nano-modification technology for enhancing the lithography and etching performance
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You, HC; Ko, FH; Lei, TF |
| 國立交通大學 |
2014-12-08T15:19:21Z |
Direct quantitative analysis of phthalate esters as micro-contaminants in cleanroom air and wafer surfaces by auto-thermal desorption-gas chromatography-mass spectrometry
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Kang, YH; Den, W; Bai, HL; Ko, FH |
| 國立交通大學 |
2014-12-08T15:18:51Z |
Structural transformation of acrylic resin upon controlled electron-beam exposure yields positive and negative resists
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Chen, JK; Ko, FH; Chang, TC |
| 國立交通大學 |
2014-12-08T15:18:09Z |
Self-aligned platinum-silicide nanowires for biomolecule sensing
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Ko, FH; Yeh, ZH; Chen, CC; Liu, TF |
| 國立交通大學 |
2014-12-08T15:17:08Z |
Fabrication of biomimetic super-amphiphobic surfaces through plasma modification of benzoxazine films
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Wang, CF; Chiou, SF; Ko, FH; Chou, CT; Lin, HC; Huang, CF; Chang, FC |
Showing items 1-25 of 34 (2 Page(s) Totally)
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