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教育部委託研究計畫      計畫執行:國立臺灣大學圖書館
 
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機構 日期 題名 作者
臺大學術典藏 2018-09-10T09:50:34Z Method for Compensating Proximity Effects of Particle Beam Lithography Processes Kuen-Yu Tsai;Chun-Hung Liu;Chooi-Wan Ng;Pei-Lin Tien; Kuen-Yu Tsai; Chun-Hung Liu; Chooi-Wan Ng; Pei-Lin Tien; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:50:34Z Method for Compensating Proximity Effects of Particle Beam Lithography Processes Kuen-Yu Tsai;Chun-Hung Liu;Chooi-Wan Ng;Pei-Lin Tien; Kuen-Yu Tsai; Chun-Hung Liu; Chooi-Wan Ng; Pei-Lin Tien; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:50:34Z Method for Compensating Effect of Patterning Process and Apparatus Thereof Yi-Sheng Su; KUEN-YU TSAI; Kuen-Yu Tsai; Chooi-Wan Ng; Kuen-Yu Tsai;Chooi-Wan Ng;Yi-Sheng Su
臺大學術典藏 2018-09-10T09:50:34Z Method for Compensating Effect of Patterning Process and Apparatus Thereof Yi-Sheng Su; KUEN-YU TSAI; Kuen-Yu Tsai; Chooi-Wan Ng; Kuen-Yu Tsai;Chooi-Wan Ng;Yi-Sheng Su
臺大學術典藏 2018-09-10T09:50:34Z Method for Compensating Effect of Patterning Process and Apparatus Thereof Yi-Sheng Su; KUEN-YU TSAI; Kuen-Yu Tsai; Chooi-Wan Ng; Kuen-Yu Tsai;Chooi-Wan Ng;Yi-Sheng Su
臺大學術典藏 2018-09-10T09:50:33Z Impacts of point spread function accuracy on patterning prediction and proximity effect correction in low-voltage electron-beam-direct-write lithography Chun-Hung Liu;Philip C. W. Ng;Yu-Tian Shen;Sheng-Wei Chien;Kuen-Yu Tsai; Chun-Hung Liu; Philip C. W. Ng; Yu-Tian Shen; Sheng-Wei Chien; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:50:33Z Impacts of point spread function accuracy on patterning prediction and proximity effect correction in low-voltage electron-beam-direct-write lithography Chun-Hung Liu;Philip C. W. Ng;Yu-Tian Shen;Sheng-Wei Chien;Kuen-Yu Tsai; Chun-Hung Liu; Philip C. W. Ng; Yu-Tian Shen; Sheng-Wei Chien; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:50:33Z Impacts of point spread function accuracy on patterning prediction and proximity effect correction in low-voltage electron-beam-direct-write lithography Chun-Hung Liu;Philip C. W. Ng;Yu-Tian Shen;Sheng-Wei Chien;Kuen-Yu Tsai; Chun-Hung Liu; Philip C. W. Ng; Yu-Tian Shen; Sheng-Wei Chien; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:43:35Z Solution-refined method for electrostatic potential distribution of large-scale electron optics Lee, Y.-M.;Li, J.-H.;Sheu, T.-W.-H.;Tsai, K.-Y.;Yen, J.-Y.; Lee, Y.-M.; Li, J.-H.; Sheu, T.-W.-H.; Tsai, K.-Y.; Yen, J.-Y.; KUEN-YU TSAI; JIA-YUSH YEN
臺大學術典藏 2018-09-10T09:25:00Z New method of optimizing writing parameters in electron beam lithography systems for throughput improvement considering patterning fidelity constraints Hoi-Tou Ng;Yu-Tian Shen;Sheng-Yung Chen;Chun-Hung Liu;Philip C. W. Ng;Kuen-Yu Tsai; Hoi-Tou Ng; Yu-Tian Shen; Sheng-Yung Chen; Chun-Hung Liu; Philip C. W. Ng; Kuen-Yu Tsai; KUEN-YU TSAI

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