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Showing items 31-80 of 214  (5 Page(s) Totally)
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Institution Date Title Author
國立交通大學 2014-12-08T15:44:15Z High quality interpoly-oxynitride grown by NH3 nitridation and N2O RTA treatment Pan, TM; Lei, TF; Yang, WL; Cheng, CM; Chao, TS
國立交通大學 2014-12-08T15:44:05Z High-k cobalt-titanium oxide dielectrics formed by oxidation of sputtered Co/Ti or Ti/Co films Pan, TM; Lei, TF; Chao, TS
國立交通大學 2014-12-08T15:44:02Z Comparison of ultrathin CoTiO3 and NiTiO3 high-k gate dielectrics Pan, TM; Lei, TF; Chao, TS
國立交通大學 2014-12-08T15:44:00Z High reliability polyoxide fabricated by using TEOS oxide deposited on disilane polysilicon film Lee, JW; Lee, CL; Lei, TF; Lai, CS
國立交通大學 2014-12-08T15:43:52Z Characterization of ultrathin oxynitride (18-21 angstrom) gate dielectrics by NH3 nitridation and N2O RTA treatment Pan, TM; Lei, TF; Wen, HC; Chao, TS
國立交通大學 2014-12-08T15:43:50Z One-step cleaning solution to replace the conventional RCA two-step cleaning recipe for pregate oxide cleaning Pan, TM; Lei, TF; Chao, TS; Liaw, MC; Ko, FH; Lu, CP
國立交通大學 2014-12-08T15:43:47Z Focus measurement with a simple pattern design Ku, CY; Lei, TF; Lin, HK
國立交通大學 2014-12-08T15:43:39Z High quality interpoly dielectrics deposited on the nitrided-polysilicon for nonvolatile memory devices Yang, WL; Chao, TS; Cheng, CM; Pan, TM; Lei, TF
國立交通大學 2014-12-08T15:43:37Z The enhancement of nitrogen incorporation in RTN2O annealed TEOS oxide fabricated on disilane-based polysilicon films Lee, JW; Chen, WD; Lei, TF; Lee, CL
國立交通大學 2014-12-08T15:43:37Z Expanding the process window and reducing the optical proximity effect by post-exposure delay Ku, CY; Shieh, JM; Chiou, TB; Lin, HK; Lei, TF
國立交通大學 2014-12-08T15:43:31Z Improvements in both thermal stability of Ni-silicide and electrical reliability of gate oxides using a stacked polysilicon gate structure Lee, JW; Lin, SX; Lei, TF; Lee, CL
國立交通大學 2014-12-08T15:43:30Z Monitoring lithographic focus and tilting performance by off-line overlay measurement tools Ku, CY; Lei, TF; Cheng, DS
國立交通大學 2014-12-08T15:43:27Z Electrical characteristics of thin cerium oxide film on silicon substrate by reactive DC sputtering Pan, TM; Chien, CH; Lei, TF; Chao, TS; Huang, TY
國立交通大學 2014-12-08T15:43:27Z An investigation of scanning capacitance microscopy on iron-contaminated p-type silicon Chang, MN; Chang, TY; Pan, FM; Wu, BW; Lei, TF
國立交通大學 2014-12-08T15:43:19Z Thin tunnel oxide grown on silicon substrate pretreated by CF4 plasma Lee, JW; Lei, TF; Lee, CL
國立交通大學 2014-12-08T15:43:18Z Comparison of novel cleaning solutions, with various chelating agents for post-CMP cleaning on poly-Si film Pan, TM; Lei, TF; Ko, FH; Chao, TS; Chiu, TH; Lee, YH; Lu, CP
國立交通大學 2014-12-08T15:43:07Z Nitrogen implantation and in situ HF vapor clean for deep submicrometer n-MOSFETs Chen, JH; Lei, TF; Chen, CL; Chao, TS; Wen, WY; Chen, KT
國立交通大學 2014-12-08T15:42:25Z Characteristics of polycrystalline silicon thin-film transistors with electrical source/drain extensions induced by a bottom sub-gate Yu, M; Lin, HC; Chen, GH; Huang, TY; Lei, TF
國立交通大學 2014-12-08T15:42:23Z Performance evaluation of cleaning solutions enhanced with tetraalkylammonium hydroxide substituents for post-CMP cleaning on poly-Si film Pan, TM; Lei, TF; Ko, FH; Chao, TS; Liaw, MC; Lee, YH; Lu, CP
國立交通大學 2014-12-08T15:42:22Z Thin oxides grown on disilane-based polysilicon Lee, JW; Lei, TF; Lee, CL
國立交通大學 2014-12-08T15:42:14Z Improvement of low-temperature gate dielectric formed in N2O plasma by an additional CF4 pretreatment process Chang, TY; Lei, TF; Chao, TS; Wen, HC; Chen, HW
國立交通大學 2014-12-08T15:42:08Z Numerical simulation of quantum effects in high-k gate dielectric MOS structures using quantum mechanical models Li, YM; Lee, JW; Tang, TW; Chao, TS; Lei, TF; Sze, SM
國立交通大學 2014-12-08T15:42:06Z Observation of differential capacitance images on slightly iron-contaminated p-type silicon Chang, MN; Chen, CY; Pan, FM; Chang, TY; Lei, TF
國立交通大學 2014-12-08T15:42:06Z Self-aligned fabrication of thin-film transistors with field-induced drain Yu, CM; Lin, HC; Lin, CY; Yeh, KL; Huang, TY; Lei, TF
國立交通大學 2014-12-08T15:42:06Z Impact of nitrogen and/or fluorine implantation on deep-submicron Co-salicide process Chang, TY; Lei, TF; Chao, TS; Chen, SW; Kao, LM; Chen, SK; Tuan, A; Su, TP
國立交通大學 2014-12-08T15:41:51Z A physical model for the hysteresis phenomenon of the ultrathin ZrO2 film Wang, JC; Chiao, SH; Lee, CL; Lei, TF; Lin, YM; Wang, MF; Chen, SC; Yu, CH; Liang, MS
國立交通大學 2014-12-08T15:41:47Z Improving the electrical integrity of Cu-CoSi2 contacted n(+)p junction diodes using nitrogen-incorporated Ta films as a diffusion barrier Yang, WL; Wu, WF; You, HC; Ou, KL; Lei, TF; Chou, CP
國立交通大學 2014-12-08T15:41:43Z Effect of CF4 plasma pretreatment on low temperature oxides Chang, TY; Chen, HW; Lei, TF; Chao, TS
國立交通大學 2014-12-08T15:41:37Z Growing high-performance tunneling oxide by CF4 plasma pretreatment Chang, TY; Lee, JW; Lei, TF; Lee, CL; Wen, HC
國立交通大學 2014-12-08T15:41:32Z Characteristics of vertical thermal/PECVD polysilicon oxides formed on the sidewall of polysilicon films Lee, MZ; Chang, YA; Lee, CL; Lei, TF
國立交通大學 2014-12-08T15:41:27Z Effects of BCl3 passivation on Pt/Al/n-InP diodes Huang, WC; Lei, TF; Lee, CL
國立交通大學 2014-12-08T15:41:08Z Novel vertical polysilicon thin-film transistor with excimer-laser annealing Lee, MZ; Lee, CL; Lei, TF
國立交通大學 2014-12-08T15:41:01Z Highly reliable nickel silicide formation with a Zr capping layer Lee, TL; Lee, JW; Lee, MC; Lei, TF; Lee, CL
國立交通大學 2014-12-08T15:40:24Z A one-step single-cleaning solution for CMOS processes Chao, TS; Yeh, CH; Pan, TM; Lei, TF; Li, YH
國立交通大學 2014-12-08T15:40:13Z Characterization of temperature dependence for HfO2 gate dielectrics treated in NH3 plasma Wang, JC; Shie, DC; Lei, TF; Lee, CL
國立交通大學 2014-12-08T15:40:06Z High reliability ultrathin interpolyoxynitride dielectrics prepared by N2O plasma annealing Wang, JC; Lee, JW; Kuo, LT; Lei, TF; Lee, CL
國立交通大學 2014-12-08T15:40:05Z H-2 and NH3 plasma passivation on poly-Si TFTs with bottom-sub-gate induced electrical junctions Yu, CM; Lin, HC; Huang, TY; Lei, TF
國立交通大學 2014-12-08T15:39:45Z Carrier transportation of rapid thermal annealed CeO2 gate dielectrics Wang, JC; Chiang, KC; Lei, TF; Lee, CL
國立交通大學 2014-12-08T15:39:40Z Improved characteristics of ultrathin CeO2 by using postnitridation annealing Wang, JC; Hung, YP; Lee, CL; Lei, TF
國立交通大學 2014-12-08T15:39:29Z Turnaround of hysterisis for capacitance-voltage characteristics of hafnium oxynitride dielectrics Wang, JC; Shie, DC; Lei, TF; Lee, CL
國立交通大學 2014-12-08T15:39:26Z Efficient improvement of hot-carrier-induced device's degradation for sub-0.1 mu m complementary metal-oxide-semiconductor field-effect-transistor technology Lin, JC; Yeh, WK; Lei, TF
國立交通大學 2014-12-08T15:39:00Z Fabrication of sub-60-nm contact holes in silicon dioxide layers Ko, FH; You, HC; Chu, TC; Lei, TF; Hsu, CC; Chen, HL
國立交通大學 2014-12-08T15:38:47Z Novel one-step aqueous solutions to replace pregate oxide cleans Pan, TM; Lei, TF; Ko, FH; Chao, TS; Chin, TH; Lu, CP
國立交通大學 2014-12-08T15:38:37Z Suppression of the floating-body effect in poly-Si thin-film transistors with self-aligned Schottky barrier source and ohmic body contact structure Kuo, PY; Chao, TS; Lei, TF
國立交通大學 2014-12-08T15:37:17Z Influence of measuring environment on the electrical characteristics of pentacene-based thin film transistors Wang, YW; Cheng, HL; Wang, YK; Hu, TH; Ho, JC; Lee, CC; Lei, TF; Yeh, CF
國立交通大學 2014-12-08T15:37:03Z CF4 plasma treatment for fabricating high-performance and reliable solid-phase-crystallized poly-Si TFTs Wang, SD; Lo, WH; Lei, TF
國立交通大學 2014-12-08T15:37:01Z Improvement of junction leakage by using a Zr cap layer on a 30 nm ultrashallow nickel-silicide junction Lee, TL; Lee, MZ; Lei, TF; Lee, CL
國立交通大學 2014-12-08T15:36:04Z Observation of localized breakdown spots in thin SiO2 films using scanning capacitance microscopy Wang, SD; Chang, MN; Chen, CY; Lei, TF
國立交通大學 2014-12-08T15:27:51Z IMPROVED ELECTRICAL CHARACTERISTICS OF THIN-FILM TRANSISTORS FABRICATED ON NITROGEN-IMPLANTED POLYSILICON FILMS YANG, CK; LEI, TF; LEE, CL
國立交通大學 2014-12-08T15:27:34Z Low temperature (850 degrees C) two-step N2O annealed thin gate oxides Lai, CS; Lee, CL; Lei, TF; Chao, TS; Peng, CH; Wang, HC

Showing items 31-80 of 214  (5 Page(s) Totally)
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