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"lei tf"的相关文件
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| 國立交通大學 |
2014-12-08T15:47:36Z |
Improvement of reliability of metal-oxide semiconductor field-effect transistors with N2O nitrided gate oxide and N2O polysilicon gate reoxidation
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Lai, CS; Chao, TS; Lei, TF; Lee, CL; Huang, TY; Chang, CY |
| 國立交通大學 |
2014-12-08T15:46:44Z |
Improvement of ultra-thin 3.3 nm thick oxide for co-salicide process using NF3 annealed poly-gate
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Chang, TY; Lei, TF; Chao, TS; Huang, CT; Chen, SK; Tuan, A; Chou, S |
| 國立交通大學 |
2014-12-08T15:46:40Z |
Enhancement of integrity of polysilicon oxide by using a combination of N2O nitridation and CMP process
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Lei, TF; Chen, JH; Wang, MF; Chao, TS |
| 國立交通大學 |
2014-12-08T15:46:12Z |
A novel Si-B diffusion source for p(+)-poly-Si gate
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Chao, TS; Kuo, CP; Chen, TP; Lei, TF |
| 國立交通大學 |
2014-12-08T15:46:06Z |
Improvement of junction leakage of nickel silicided junction by a Ti-capping layer
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Hou, TH; Lei, TF; Chao, TS |
| 國立交通大學 |
2014-12-08T15:45:23Z |
Low contact resistance of poly-plug structure by in-situ HF-vapour cleaning
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Chen, JH; Lei, TF; Chao, TS; Su, TP; Huang, SJ; Tuan, A; Chen, SK |
| 國立交通大學 |
2014-12-08T15:45:12Z |
Improvement of polysilicon oxide integrity using NF3-annealing
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Yang, WL; Shieh, MS; Chen, YM; Chao, TS; Liu, DG; Lei, TF |
| 國立交通大學 |
2014-12-08T15:45:06Z |
Novel cleaning solutions for polysilicon film post chemical mechanical polishing
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Pan, TM; Lei, TF; Chen, CC; Chao, TS; Liaw, MC; Yang, WL; Tsai, MS; Lu, CP; Chang, WH |
| 國立交通大學 |
2014-12-08T15:45:01Z |
Robust ultrathin oxynitride dielectrics by NH3 nitridation and N2O RTA treatment
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Pan, TM; Lei, TF; Chao, TS |
| 國立交通大學 |
2014-12-08T15:45:00Z |
Characteristics of polysilicon oxides combining N2O nitridation and CMP processes
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Lei, TF; Chen, JH; Wang, MF; Chao, TS |
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