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机构 日期 题名 作者
國立交通大學 2014-12-08T15:43:50Z One-step cleaning solution to replace the conventional RCA two-step cleaning recipe for pregate oxide cleaning Pan, TM; Lei, TF; Chao, TS; Liaw, MC; Ko, FH; Lu, CP
國立交通大學 2014-12-08T15:43:47Z Focus measurement with a simple pattern design Ku, CY; Lei, TF; Lin, HK
國立交通大學 2014-12-08T15:43:39Z High quality interpoly dielectrics deposited on the nitrided-polysilicon for nonvolatile memory devices Yang, WL; Chao, TS; Cheng, CM; Pan, TM; Lei, TF
國立交通大學 2014-12-08T15:43:37Z The enhancement of nitrogen incorporation in RTN2O annealed TEOS oxide fabricated on disilane-based polysilicon films Lee, JW; Chen, WD; Lei, TF; Lee, CL
國立交通大學 2014-12-08T15:43:37Z Expanding the process window and reducing the optical proximity effect by post-exposure delay Ku, CY; Shieh, JM; Chiou, TB; Lin, HK; Lei, TF
國立交通大學 2014-12-08T15:43:31Z Improvements in both thermal stability of Ni-silicide and electrical reliability of gate oxides using a stacked polysilicon gate structure Lee, JW; Lin, SX; Lei, TF; Lee, CL
國立交通大學 2014-12-08T15:43:30Z Monitoring lithographic focus and tilting performance by off-line overlay measurement tools Ku, CY; Lei, TF; Cheng, DS
國立交通大學 2014-12-08T15:43:27Z Electrical characteristics of thin cerium oxide film on silicon substrate by reactive DC sputtering Pan, TM; Chien, CH; Lei, TF; Chao, TS; Huang, TY
國立交通大學 2014-12-08T15:43:27Z An investigation of scanning capacitance microscopy on iron-contaminated p-type silicon Chang, MN; Chang, TY; Pan, FM; Wu, BW; Lei, TF
國立交通大學 2014-12-08T15:43:19Z Thin tunnel oxide grown on silicon substrate pretreated by CF4 plasma Lee, JW; Lei, TF; Lee, CL
國立交通大學 2014-12-08T15:43:18Z Comparison of novel cleaning solutions, with various chelating agents for post-CMP cleaning on poly-Si film Pan, TM; Lei, TF; Ko, FH; Chao, TS; Chiu, TH; Lee, YH; Lu, CP
國立交通大學 2014-12-08T15:43:07Z Nitrogen implantation and in situ HF vapor clean for deep submicrometer n-MOSFETs Chen, JH; Lei, TF; Chen, CL; Chao, TS; Wen, WY; Chen, KT
國立交通大學 2014-12-08T15:42:25Z Characteristics of polycrystalline silicon thin-film transistors with electrical source/drain extensions induced by a bottom sub-gate Yu, M; Lin, HC; Chen, GH; Huang, TY; Lei, TF
國立交通大學 2014-12-08T15:42:23Z Performance evaluation of cleaning solutions enhanced with tetraalkylammonium hydroxide substituents for post-CMP cleaning on poly-Si film Pan, TM; Lei, TF; Ko, FH; Chao, TS; Liaw, MC; Lee, YH; Lu, CP
國立交通大學 2014-12-08T15:42:22Z Thin oxides grown on disilane-based polysilicon Lee, JW; Lei, TF; Lee, CL
國立交通大學 2014-12-08T15:42:14Z Improvement of low-temperature gate dielectric formed in N2O plasma by an additional CF4 pretreatment process Chang, TY; Lei, TF; Chao, TS; Wen, HC; Chen, HW
國立交通大學 2014-12-08T15:42:08Z Numerical simulation of quantum effects in high-k gate dielectric MOS structures using quantum mechanical models Li, YM; Lee, JW; Tang, TW; Chao, TS; Lei, TF; Sze, SM
國立交通大學 2014-12-08T15:42:06Z Observation of differential capacitance images on slightly iron-contaminated p-type silicon Chang, MN; Chen, CY; Pan, FM; Chang, TY; Lei, TF
國立交通大學 2014-12-08T15:42:06Z Self-aligned fabrication of thin-film transistors with field-induced drain Yu, CM; Lin, HC; Lin, CY; Yeh, KL; Huang, TY; Lei, TF
國立交通大學 2014-12-08T15:42:06Z Impact of nitrogen and/or fluorine implantation on deep-submicron Co-salicide process Chang, TY; Lei, TF; Chao, TS; Chen, SW; Kao, LM; Chen, SK; Tuan, A; Su, TP
國立交通大學 2014-12-08T15:41:51Z A physical model for the hysteresis phenomenon of the ultrathin ZrO2 film Wang, JC; Chiao, SH; Lee, CL; Lei, TF; Lin, YM; Wang, MF; Chen, SC; Yu, CH; Liang, MS
國立交通大學 2014-12-08T15:41:47Z Improving the electrical integrity of Cu-CoSi2 contacted n(+)p junction diodes using nitrogen-incorporated Ta films as a diffusion barrier Yang, WL; Wu, WF; You, HC; Ou, KL; Lei, TF; Chou, CP
國立交通大學 2014-12-08T15:41:43Z Effect of CF4 plasma pretreatment on low temperature oxides Chang, TY; Chen, HW; Lei, TF; Chao, TS
國立交通大學 2014-12-08T15:41:37Z Growing high-performance tunneling oxide by CF4 plasma pretreatment Chang, TY; Lee, JW; Lei, TF; Lee, CL; Wen, HC
國立交通大學 2014-12-08T15:41:32Z Characteristics of vertical thermal/PECVD polysilicon oxides formed on the sidewall of polysilicon films Lee, MZ; Chang, YA; Lee, CL; Lei, TF

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