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"liao ming han"
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| 臺大學術典藏 |
2007 |
Characterization of the Ultrathin HfO2 and Hf-Silicate Films Grown by Atomic Layer Deposition
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Chen, Tze Chiang; Peng, Cheng-Yi; Tseng, Chih-Hung; Liao, Ming-Han; Chen, Mei-Hsin; Wu, Chih-I; Chern, Ming-Yau; Tzeng, Pei-Jer; Liu, Chee Wee; Chen, Tze Chiang; Peng, Cheng-Yi; Tseng, Chih-Hung; Liao, Ming-Han; Chen, Mei-Hsin; Wu, Chih-I; Chern, Ming-Yau; Tzeng, Pei-Jer; Liu, Chee Wee |
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