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Showing items 1-2 of 2 (1 Page(s) Totally) 1 View [10|25|50] records per page
國立交通大學 |
2014-12-08T15:49:17Z |
TiSixOy as an absorptive shifter for embedded phase-shifting mask in 248 nm and the modification of R-T method for the determination of shifter's n and k
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Loong, WA; Chen, CW; Chang, YH; Lin, CM; Cui, Z; Lung, CA |
國立交通大學 |
2014-12-08T15:02:03Z |
Study on optimization of annular off-axis illumination using Taguchi method for 0.35 mu m dense line/space
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Loong, WA; Tseng, JC; Chen, TC; Lung, CA |
Showing items 1-2 of 2 (1 Page(s) Totally) 1 View [10|25|50] records per page
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