臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立中山大學	2000	Concepts for creating ultra deep trenches using deep x-ray lithography	Y. Cheng; B.Y. Shew; C.H. Lin; M.K. Chyu
國立中山大學	1999-12-03	Ultra-deep LIGA process	Y. Cheng;B.Y. Shew;C.H. Lin;M.K. Chyu

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