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机构 日期 题名 作者
國立交通大學 2014-12-08T15:39:16Z Effect of deposition temperature, on thermal stability in high-density plasma chemical vapor deposition fluorine-doped silicon dioxide Cheng, YL; Wang, YL; Chen, HW; Lan, JL; Liu, CP; Wu, SA; Wu, YL; Lo, KY; Feng, MS
國立交通大學 2014-12-08T15:38:56Z Optimization of post-N-2 treatment and undoped-Si-glass cap to improve metal wring delamination in deep submicron high-density plasma-fluorinated silica glass intermetal dielectric application Cheng, YL; Wang, YL; Lan, JK; Wu, SA; Chang, SC; Lo, KY; Feng, MS
國立交通大學 2014-12-08T15:38:39Z Direct COSi2 thin-film formation with homogeneous nanograin-size distribution by oxide-mediated silicidation Chang, JJ; Liu, CP; Chen, SW; Chang, CC; Hsieh, TE; Wang, YL
國立交通大學 2014-12-08T15:37:01Z Stress migration and electromigration improvement for copper dual damascene interconnection Wang, TC; Hsieh, TE; Wang, MT; Su, DS; Chang, CH; Wang, YL; Lee, JYM
國立交通大學 2014-12-08T15:35:42Z Modified polycrystalline silicon chemical-vapor deposition process for improving roughness at oxide/polycrystalline silicon interface Chang, JJ; Hsieh, TE; Wang, YL; Tseng, WT; Liu, CP; Lan, CY
國立交通大學 2014-12-08T15:26:47Z Novel strategies of FSG-CMP for within-wafer uniformity improvement and wafer edge yield enhancement beyond 0.18 micro technologies Chen, KW; Wang, YL; Chang, L; Liu, CW; Lin, YK; Wang, TC; Chang, ST; Lo, KY
國立交通大學 2014-12-08T15:19:22Z Formation of pyramid-like nanostructures during cobalt film growth by magnetron sputtering Liu, CP; Chang, JJ; Chen, SW; Chung, HC; Wang, YL
國立交通大學 2014-12-08T15:19:18Z Aplication of plasma immersion ion implantation on seeding copper electroplating for multilevel interconnection Chiu, SY; Wang, YL; Chang, SC; Feng, MS
國立交通大學 2014-12-08T15:18:36Z Study of diffusion and quality control for CoSi2 formation by oxide-mediated cobalt silicidation with Ti capping Chang, JJ; Liu, CP; Hsieh, TE; Wang, YL
國立交通大學 2014-12-08T15:17:41Z CoSix thermal stability on narrow-width polysilicon resistors Chen, YM; Tu, GC; Wang, YL; Hwang, GJ; Lo, CY

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