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Institution	Date	Title	Author
國立臺灣大學	1999-10	Run-to-run control of CMP process considering aging effects of pad and disc	Chen, Argon; Guo, Ruey-Shan; Chou, Y.L.; Lin, C.L.; Dun, Jowei; Wu, S.A.
臺大學術典藏	2020-03-02T06:40:00Z	Run-To-run control of CMP process considering aging effects of pad and disc	Chen, A.; Guo, R.-S.; Chou, Y.L.; Lin, C.L.; Dun, J.; Wu, S.A.; ARGON CHEN
臺大學術典藏	2020-03-06T03:42:42Z	Run-To-run control of CMP process considering aging effects of pad and disc	Chen A.; Guo R.-S.; Chou Y.L.; Lin C.L.; Dun J.; Wu S.A.; RUEY-SHAN GUO
臺大學術典藏	2000-06	Run-to-run control schemes for CMP process subject to deterministic drifts	Guo, Ruey-Shan; Chen, Argon; Chen, Jin-Jung; Guo, Ruey-Shan; Chen, Argon; Chen, Jin-Jung
國立臺灣大學	2000-06	Run-to-run control schemes for CMP process subject to deterministic drifts	Guo, Ruey-Shan; Chen, Argon; Chen, Jin-Jung
臺大學術典藏	2020-03-02T06:39:59Z	Run-to-run control schemes for CMP process subject to deterministic drifts	Guo, R.-S.; Chen, A.; Chen, J.-J.; ARGON CHEN
臺大學術典藏	2020-03-06T03:42:43Z	Run-to-run control schemes for CMP process subject to deterministic drifts	Guo R.-S.; Chen A.; Chen J.-J.; RUEY-SHAN GUO
國立成功大學	2013-02-01	Run-to-Run Control Utilizing Virtual Metrology With Reliance Index	Kao, Chi-An; Cheng, Fan-Tien; Wu, Wei-Ming; Kong, Fan-Wei; Huang, Hsuan-Heng
臺大學術典藏	2020-03-02T06:40:09Z	Run-To-Run sensor variation monitoring for process fault diagnosis in semiconductor manufacturing	Blue, J.; Roussy, A.; Pinaton, J.; JAKEY BLUE
中原大學	2004-09	Run-to-Run控制法則分析與比較	張耀仁;曹永誠

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